Bird 8890-300SC13 2.5 KW, DC to 28 MHz Precision RF Load 8890-300SC13, 13.56 MHz Ultra Stable Oil-Dielectric RF Termination For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control. A key component in ensuring accurate & repeatable RF power delivery to the chamber is calibration, regulation & monitoring of the RF generator. Bird now offers ultra-stable, low VSWR loads for quick and precise measurement of generator power output when used with precision power sensors such as the Bird 4020 series. The 8890-300SC13 not only provide low VSWR but also less than 0.1 dB total change in VSWR at process critical frequencies. There is no need for load warm-up or risk of repeatability due to calibration for different lengths of time. This can minimize the errors associated with this calibration and control one of the more critical process variables.

This table outlines the detailed specifications for the Bird 8890-300SC13, a 2.5 kW RF termination load designed for ultra-stable performance. It boasts excellent impedance matching and VSWR stability across its operating frequency range, providing robust performance under various environmental conditions and ensuring optimal energy absorption at specific stability frequencies. The device comes equipped with standard connectors and optional safety features, including an interlock thermoswitch, making it suitable for demanding RF power management applications.