能够测量的工件：直径 < 600mm、粗糙度 < Ra 0.1μm、超快速、超高精度的表面形貌三维成像。直到今天, VICT 技术在我们各式各样的干涉仪上都获得了成功。无论是60mm 直径的小型干涉仪, 还是 600mm 直径的大型干涉仪; 无论是机械移相, 还是波长调谐。它们都证明了:VICT 是可靠, 而且是颠覆性的。VICT 技术原理：相较于传统的线性扫描，我们使用独有的非线性扫描曲线，以及独有的基于谐波抵消原理的相位计算公式，计算结果精确至 1 皮米。Workpieces that can be measured: diameters < 600 mm, roughness < Ra 0.1 μm, ultra-fast, ultra-precise 3D imaging of surface morphology. Today, VICT technology has been used successfully on a wide range of our interferometers. Whether it is a small 60mm diameter interferometer or a large 600mm diameter interferometer; whether it is mechanical phase shifting or wavelength tuning. They have all proved that VICT is reliable and disruptive.VICT Principle: In contrast to conventional linear scanning, we use a unique non-linear scanning curve and a unique phase calculation formula based on the harmonic cancellation principle, which is accurate down to 1 pico-meter.

通过光路扩展，测量粗糙度> Ra 0.3 μm 的平面工件。通过CGH补偿器, 测量复杂曲面，黑色或透明工件, 仍然能够测量。评估每一次数据采样的质量，并丢弃不合格的数据。VICT High 模式只接受最高质量的数据，VICT Dop 模式会在最恶劣的数据中筛选可用数据。实时分析环境扰动, 选择优秀的的采样时机, 并分析环境扰动对计算结果的影响。VICT High 超高精度 测量模式支持到0.1纳米 ( 1/6330 λ）RMS重复精度 和1纳米（1/633 λ）PV重复精度，对环境扰动进行建模分析, 包括振动、气流、光场在内的负面影响排除。没有使用多次测量取平均的方法, 不会导致被测物面型被“美化”。适合半导体应用的MST(多表面测量)一次采集, 同时完成上表面、下表面、厚度的计量。适合半导体应用的绝对测距干涉，量程 > 100 μm可进行台阶、翘曲度、热变形的测量。VICT Dop 多普勒抗振动测量模式非常恶劣的工业环境下仍正常工作，所有模式中最高的测量效率，允许不使用隔振平台。蒙版跟踪：典型应用场景: 批量检测方形工件内的椭圆形区域。对摆放位置和角度没有任何要求、自动探测工件的有无、跟踪耗时小于0.1 秒。Measurement of flat workpieces with roughness > Ra 0.3 μm by means of optical path extension. With the CGH compensator, complex curved surfaces, black or transparent workpieces can still be measured. Evaluate the quality of each data sample and discard substandard data; VICT High mode accepts only the highest quality data and VICT Dop mode sifts through the worst data available. Analyzes environmental perturbations in real time, selects the optimal sampling time, and analyzes the impact of environmental perturbations on the calculated results.VICT High Ultra High Accuracy Measurement modes support up to 0.1 nm (1/6330 λ) RMS repeatability and 1 nm (1/633 λ) PV repeatability to model and analyze environmental perturbations and to exclude negative impacts, including vibration, airflow, and light fields. Multiple measurements are not averaged, which does not lead to "beautification" of the measured object's surface shape.MST (multi-surface measurement) for semiconductors, simultaneous measurement of upper surface, lower surface and thickness in a single acquisition. Absolute ranging interferometry for semiconductor applications, with ranges > 100 μm for measurement of steps, warpage, and thermal distortion.VICT Dop Doppler anti-vibration measurement modes for very harsh industrial environments, with the highest measurement efficiency of all modes, and allowing for the elimination of the use of vibration isolation platforms. Mask Tracking: Typical application scenario: batch inspection of elliptical areas within square workpieces. No placement or angle requirements, automatic detection of the presence or absence of the part, tracking time less than 0.1 seconds.

出色的动态范围，超过100条干涉条纹, 仍然可以分析。可设置外轮廓的 NG 条件, 排除外形破损的产品。超分辨三维图：皮米分辨率的三维图, 支持旋转、平移、XY 缩放、Z 缩放。使用独有的曲面生成与渲染算法, 以及超采样抗锯齿技术。清洁度分析：分析脏点和异常点, 可以将 脏点数量、面积 满足条件的工件 NG。原理是将干涉条纹消除后, 检测颗粒状异常点, 因此不会造成误判。不需要额外的扫描, 在干涉测量的同时完成洁净度分析。Excellent dynamic range, more than 100 interference fringes can still be analyzed. NG conditions can be set for the outer contour to exclude products with broken profiles. Ultra-resolution 3D mapping: Picometer resolution 3D mapping with support for rotation, translation, XY scaling, and Z scaling. Uses proprietary surface generation and rendering algorithms, as well as oversampling anti-aliasing techniques. Cleanliness Analysis: Analyzes dirty spots and anomalies, and can identify the number and area of dirty spots on workpieces that meet the conditions of NG. The principle is to detect granular anomalies after eliminating interference fringes, so that there are no false positives. No additional scanning is required, and cleanliness analysis can be done at the same time as interferometry.

根据文献, 干涉计算对 0~120 Hz 的振动敏感。因此, 我们将机械结构的 7 阶模态设计到 127 Hz，大大降低了机械结构对振动的敏感性。超高重复精度，对一片 250mm 直径的平晶进行 1000 次连续测量，PV 值的重复精度为 5.7 纳米 (1/111 λ），RMS 值的重复精度为 0.38 纳米 (1/1666 λ）VICT Dop模式,数据未经人为修改，三维成像原理面型干涉是目前最主流的光学表面计量手段，Fiz3D 使用 Fizeau(斐索)干涉光路。According to the literature, interferometric calculations are sensitive to vibrations from 0 to 120 Hz. Therefore, we designed the 7th order modal of the mechanical structure to 127 Hz, which greatly reduces the sensitivity of the mechanical structure to vibration. Ultra-high repeatability, 1000 consecutive measurements on a 250mm diameter flat crystal, the repeatability of the PV value is 5.7 nm (1/111 λ), the repeatability of the RMS value is 0.38 nm (1/1666 λ) VICT Dop Mode, the data has not been altered by human beings, the principle of three-dimensional imaging surface interferometry is the most dominant means of optical surface metrology, and Fiz3D is the best method of measuring the surface of a flat crystal. Fiz3D uses the Fizeau interferometric light path.

Fiz3D面型干涉仪使用了全新的计算技术，独有的 VICT Technology VICT（Vibration Immunity at Crest and Trough 在波峰和波谷处的振动免疫） 打破了“干涉仪非常容易受到干扰、要在十分精密的环境下工作”的认知。VICT 技术诞生于一个冬季的深夜, 狂风将大楼吹得左右摇晃.  干涉仪被放置在大楼的第四层, 振动非常剧烈, 甚至不能看清干涉条纹. 工程师十分苦恼, 因为干涉仪已经无法正常工作, 每个测量结果都有强烈的振纹。振动时有时无, 那是否存在一个理想的时间点, 仪器受振动的干 扰最小？工程师写了一个简单的程序, 用于侦测优秀的采样时机, 这个程序工作得很完美.更进一步地, 我们想到: 如果将环境扰动（振动、气流、相机噪声…）理解为频域干扰, 实时计算扰 动的频率和幅度, 那是否可以抵抗所有的环境扰动？ — —于是我们拥有了 VICT 技术 The Fiz3D Faceted Interferometer utilizes a new computational technique, the unique VICT Technology. VICT (Vibration Immunity at Crest and Trough) breaks the perception that interferometers are very susceptible to interference and have to work in very delicate environments. The wind was blowing the building from side to side.  The interferometer was placed on the fourth floor of the building, where the vibrations were so severe that the interference fringes could not even be seen. The engineers were frustrated because the interferometer was no longer working properly and every measurement had a strong vibration pattern. The vibrations come and go, so is there an ideal point in time when the instrument is least disturbed by the vibrations? Is there an ideal point in time when the instrument is least disturbed by vibration? The engineers wrote a simple program to detect the optimal sampling time, and it worked perfectly. Further, it occurred to us that if the environmental disturbances (vibrations, air currents, camera noise...) were interpreted as frequency domain disturbances, and the frequency and amplitude of the disturbances were calculated in real time, then the frequency and amplitude of the disturbances could be calculated in real time, and the frequency and amplitude of the disturbances could be calculated in real time. If we understand environmental disturbances (vibrations, air currents, camera noise...) as frequency domain disturbances, and calculate the frequency and amplitude of the disturbances in real time, can we resist all environmental disturbances? - So we have VICT technology!

基础配置

主机	亏	测量尺寸(圆形-直径) (注1)	立式使用	卧式使用
	Type100	102 mm	✔	✔
	Type150	152.4 mm	✔	✔
	Type250	250 mm	✔	✔
	Type340 (注2)	340 mm	✔	✔
	Type450	457.2 mm	✘	✔
	Type600	609.6 mm	✘	✔
	注1: 在80% 直径以内使用时, 可以获得更好的测量效果。注2: 推荐卧式使用, 立式使用时会降低精度。