Zygo Verifire XL大口径立式激光干涉仪
Verifire XL大口径立式激光干涉仪，文章来源于AMETEK阿美特克，大口径、小占地面积 – Verifire XL 是一款一站式干涉仪工作站，可轻松测试直径达 300 mm 的平面光学元器件。这款完全集成的系统易于使用，其重型倾斜平台可提供可重复的零件定位，而无需定制夹具。占地面积小，内置隔振系统，并配有控制器显示器支架，只占用很小的车间地板空间。ZYGO大口径激光干涉仪是由4英寸激光干涉仪主机经过扩束伟大口径系统，通常为双通道，即4英寸测量通道和大口径测量通道，具有多种高精度测量模式，如相位调节、波长调节、动态测量等，大口径激光干涉仪可以从常规的4英寸到12英寸、18英寸、24英寸、32英寸、36英寸。Verifire™ XL Large Diameter Vertical Laser Interferometer, Large Diameter, Small Footprint - The Verifire XL is a one-stop interferometer workstation that makes it easy to test planar optical components up to 300 mm in diameter. This fully integrated system is easy to use, and its heavy-duty tilting platform provides repeatable part positioning without the need for custom fixturing. With a small footprint, built-in vibration isolation system, and controller display stand, the ZYGO Large Bore Laser Interferometer is a beam-expanded, large-bore system that consists of a 4-inch laser interferometer mainframe, which is typically a dual-channel, i.e., 4-inch and large-bore, with a variety of high-precision measurement modes, such as phase tuning, wavelength tuning, and dynamic measurements, the large-bore laser interferometer can be extended from the conventional 4-inch laser interferometer mainframe to a 4-inch laser interferometer mainframe. Laser interferometer can be from the conventional 4 inches to 12 inches, 18 inches, 24 inches, 32 inches, 36 inches.
深圳银飞有售Verifire XL激光干涉仪
阿美特克大口径立式激光干涉仪系统组成 System Components
激光干涉仪主机(GPI™ XP/D, VeriFire™ XP/D, PE, AT+, MST 或波长调制主机)；MUX分光器（光束转换器）；扩束器（12英寸、18英寸、24英寸、32英寸、36英寸）；机械相位测量装置用于12英寸和18英寸，24英寸和32英寸及36英寸采用波长调节测量技术；参考光束：透射平板和参考平板是光学系统的必要附件；调整架：用于调整参考光束和测试光束的位置；ZYGO专利抗震技术QPSI也广泛应用在大口径系统中；独立的大口径工作站，用于测量直径达 12 英寸（300 mm）的平面光学表面面形，如镜子、窗片、半导体晶片、晶圆卡盘和密封平面。Laser interferometer mainframe (GPI™ XP/D, VeriFire™ XP/D, PE, AT+, MST or Wavelength Modulation Mainframe); MUX beamsplitter (beam converter); Beam expander (12-inch, 18-inch, 24-inch, 32-inch, 36-inch); Mechanical phase measurement device for 12-inch and 18-inch, 24-inch and 32-inch and 36-inch with Wavelength tuning measurement technology; Reference beams: Transmission and reference plates are essential accessories for optical systems; Adjustment racks: Used to adjust the position of the reference and test beams; ZYGO's patented vibration-resistant technology, QPSI, is also widely used in large-aperture systems; Stand-alone large-aperture workstations for measurement of flat optical surfaces up to 12 inches (300 mm) in diameter, such as mirrors, windows, semiconductors, wafers, wafer chucks, and seals. wafers, wafer chucks and sealing planes.
技术参数 Technical Parameters
| 激光器 | 长寿命、大功率、稳频氦氖激光器 |
| 波长 | 266nm、1053nm、1064nm、1550nm、3390nm、10600nm（定制波长） |
| 频率稳定度 | ＜0.0001nm |
| 输出功率 | ＞3mW |
| 相干长度 | 大于100m |
| 口径大小 | 12英寸、18英寸、24英寸、32英寸、36英寸 |
| 测试模式 | PSI 经典移相 QPSI抗震移相 |
| 激光器寿命 | ＞60000小时 |
| Lasers | Long life, high power, frequency stabilized HeNe lasers |
| Wavelength | 266nm, 1053nm, 1064nm, 1550nm, 3390nm, 10600nm (customized wavelength) |
| Frequency stability | ＜0.0001nm |
| Output power | ＞3mW |
| Coherence length | >100m |
| Caliber size | 12 inches, 18 inches, 24 inches, 32 inches, 36 inches |
| Test Mode | PSI classical phase shift QPSI seismic phase shift |
| Laser Life | ＞60,000 hours |
Zygo Verifire XL大口径立式激光干涉仪主要特点 Main Features
1、12 英寸（300 mm）口径，下视式立式设计，便于零件处理和对准；12-inch (300 mm) aperture, downward-looking vertical design, easy parts handling and alignment
2、一站式的独立系统，包括干涉仪主机、被动隔振系统、测试件对准台和 1/15 波 PVr 透射平面镜（TF）；one-stop stand-alone system, including interferometer mainframe, passive vibration isolation system, test piece alignment stage and 1/15-wave PVr transmission plane mirror (TF)
3、紧凑的尺寸，最大限度地减少了对宝贵地面空间的占用；Compact size minimizes valuable floor space.
4、集成的隔振和 QPSI™ 技术允许在生产环境中进行可靠的测量；Integrated vibration isolation and QPSI™ technology allow for reliable measurements in production environments.
