DynaFiz激光干涉仪，文章来源于AMETEK阿美特克zygo。新型的ZYGO DynaFiz激光干涉仪是特别设计为在有空气湍流和极点振动的环境中进行精确的光学计量的优化的光学仪器。DynaFiz 光学系统的长寿命，高功率氦氖激光源具有高的光效率，使得相机的高速快门能够“凝结"振动。这种动态才能提供了 在恶劣的环境中，传统的时刻相移技能不可能完成的可靠的测量。DynaFiz laser interferometer, article from zygo. the new ZYGO DynaFiz laser interferometer is an optimized optical instrument especially designed for precise optical metrology in environments with air turbulence and polar vibrations. the long-life, high-power helium-neon laser source of the DynaFiz optical system has a high optical efficiency that allows the camera's high-speed shutter to "condense" vibrations. This dynamic capability provides reliable measurements in harsh environments not possible with conventional phase-shifting techniques.

专为在振动频繁的环境中进行可靠的干涉测量而设计；其多功能性和灵活性足以满足广泛的应用需求，包括从高端望远镜测试到主动对准光学系统的实时相位反馈等需求。DynaFiz® 的高光效光学设计与 ZYGO 高功率 HeNe 激光源相结合，可在“冻结”振动的高摄像机快门速度下运行。这种动态能力可在对于传统的相移技术来说过于恶劣的环境中提供可靠的计量。Designed for reliable interferometry in vibration-prone environments; versatile and flexible enough to meet a wide range of applications, from high-end telescope testing to real-time phase feedback for actively aligned optical systems, the DynaFiz®'s high-efficiency optical design combined with the ZYGO high-power HeNe laser source allows operation at high camera shutter speeds with "frozen" vibrations. "vibration at high camera shutter speeds. This dynamic capability provides reliable metrology in environments that are too harsh for traditional phase shift techniques.

1、全相干光学设计，可实现最高的光效率，提高动态性能(Fully coherent optical design for maximum optical efficiency and improved dynamic performance)

2、具有 ZYGO 荣获专利的独特功能，在振动较常见的环境中进行测量有两种选择(With ZYGO's unique patented features, there are two options for measurements in environments where vibration is more prevalent)

3、ZYGO 独有的 QPSI技术，可在振动较常见的环境中实现可靠的测量(ZYGO's unique QPSI.technology for reliable measurements in environments where vibration is more common.)

4、DynaPhase瞬时数据采集技术，对振动不敏感，可在最恶劣的环境中进行测量(DynaPhase.instantaneous data acquisition technology, insensitive to vibration, for measurements in the harshest environments)

5、LivePhase采集技术提供了实时的 Zernike 反馈，用于主动监控光学系统的对准。(LivePhase.acquisition technology provides real-time Zernike feedback for active monitoring of optical system alignment.)

6、影片模式提供了以 82 帧/秒的速度采集影片和数据文件的能力(Movie mode provides the ability to capture movies and data files at up to 82 frames per second.)

7、ZYGO 制造的 HeNe 激光源(HeNe laser sources manufactured by ZYGO)

8、比市面上的激光器寿命更长，寿命长达 6 万小时(Longer lifespan than commercially available lasers, up to 60,000 hours)

9、更高的功率，改善了抗振性能，适合微光应用(Higher power with improved vibration resistance for microlight applications)

10、波长稳定在 0.0001 nm(Wavelength stabilization at 0.0001 nm)

11、光学变焦真正提高了分辨率，最高可放大 3 倍(Optical zoom truly enhances resolution with up to 3x magnification)

12、相干环纹抑制系统（CARS）消除了内部环纹的靶心，并将测量中的相干噪声降低了 10 倍(Coherent Annular Ripple Suppression System (CARS) eliminates the internal annular bullseye and reduces coherent noise in measurements by a factor of 10)

激光干涉仪产品描述(Product Description)

测长机系统Long measuring machine system： ◆测量功用：精密测量各种反射面和光学体系的表面面形、精密测量光学体系的传输波前；Measurement function: precision measurement of various reflective surfaces and optical system surface shape, precision measurement of optical system transmission wave front ◆测量技能：DynaPhase动态测量技能；可选形式：机械相移测量（PSI）；Measurement skills: DynaPhase dynamic measurement skills; optional form: mechanical phase shift measurement (PSI) ◆校准体系 Calibration system: ◆动态形式：DyanaPhase 对准向导校准；Dynamic form: DyanaPhase Alignment guide calibration; ◆移相形式：快速条纹采样体系(QFAS) (双光点定坐落十字线)；Phase Shift Format: Quick Fringe Sampling System (QFAS) (dual optical point centering crosshairs) ◆对准视场范围FOV ：±3°；Alignment field of view (FOV): ±3°. ◆测量光束直径：4″（102mm）；Measuring beam diameter : 4″(102mm) ◆光学中心线 ：4.25″（108mm）；Optical centerline: 4.25″ (108mm) ◆激光光源：大功率稳定氦-氖激光，IIIa 级；Laser light source: High-power stabilized helium-neon laser, Class IIIa ◆波长：633 nm；Wavelength: 633 nm ◆频率稳定度：< 0.0001 nm；Frequency stability: < 0.0001 nm ◆相干长度 ：＞100m；Coherence length ：＞100m ◆成像分辨率：1200 x 1200 像素；Imaging resolution: 1200 x 1200 pixels ◆帧速：50Hz（600 x 600 像素：82Hz）；Frame rate: 50Hz (600 x 600 pixels: 82Hz) ◆数据形式：10位；Data form：10 bit ◆扩大：电控塔台切换，1X,1.7X,3X；Expansion: Electrically controlled tower switching, 1X,1.7X,3X ◆偏振：挨近圆偏振（1.2：1或者更好）；Polarization: Near circular polarization (1.2:1 or better) ◆光曈调焦范围：±2m；Focus range of TEEEL: ±2m ◆无线遥控：聚焦，扩大，校准操控；遥控范围：15m；Wireless remote control: focusing, expanding, calibration control; remote control range: 15m ◆计算机和软件：高性能DELL PC ， Windows7 ， 64 位， ZYGO MetroproTM X软件；Computer and software: high-performance DELL PC, Windows 7, 64-bit, ZYGO MetroproTM X software ◆安装结构：水平卧式或垂直立式； Installation structure: horizontal horizontal or vertical vertical ◆附件：参考ZYGO 激光干涉仪附件向导文件，OMP-0463；Accessories: refer to ZYGO Laser Interferometer Accessory Wizard, OMP-0463 ◆尺度(长x宽x高) ：60 x 31 x 34 cm (23.7 x 12.1 x 13.4 in.)；带移相器长度增加9cm（3.6in.）； Dimensions (L x W x H) : 60 x 31 x 34 cm (23.7 x 12.1 x 13.4 in.); with phase shifter add 9 cm (3.6 in.) to length ◆重量 ：≤80lb（36 Kg）；带移相器增加10lb（5kg）；Weight : ≤80lb (36 Kg); with phase shifter add 10lb (5kg) ◆电源 ：100-240VAC，50/60Hz；Power supply ：100-240VAC，50/60Hz ◆保修期 ：2年；Warranty ：2 years 技能参数 Skill Parameters: ◆RMS重复性：< 0.06 nm, λ/10,000 (2σ)；RMS repeatability: < 0.06 nm, λ/10,000 (2σ) ◆RMS波前重复性：RMS wavefront repeatability:   动态形式: < 1.0 nm,λ/600 (mean + 2σ)；Dynamic form: < 1.0 nm, λ/600 (mean + 2σ)   移相形式: < 0.25 nm,λ/2500 (mean + 2σ)；Phase shift: < 0.25 nm, λ/2500 (mean + 2σ) ◆像素峰值偏差 Pixel peak deviation:   动态形式:< 2.0 nm, λ/300 (99.5th %)；Dynamic: < 2.0 nm, λ/300 (99.5th %)   移相形式: < 0.5 nm, λ/1200 (99.5th %)；Phase shift: < 0.5 nm, λ/1200 (99.5th %) ◆条纹分辨率：Stripe resolution:   动态形式：250 条纹（每种扩大倍率）；Dynamic form: 250 stripes (per magnification)   移相形式：500条纹（每种扩大倍率）；Phase-shifted form: 500 stripes (per magnification) ◆曝光时刻 ：12usec（zui小）；Exposure time: 12 usec (zui) ◆数据采样速度：≤82幅数据图像/秒；Data sampling speed: ≤82 data images/sec. LivePhaseTM ：Zernike拟合剖析的实时相位信息；LivePhaseTM : Real-time phase information from Zernike fitting profiling  ◆相位影像 记录≤82幅/秒过程中的信息，可存储为AVI格式文件和保留原始数据文件；Phase Image Record ≤82 images/second of process information, can be stored as AVI format file and retain the original data file ◆外部影像：触发器 TTL信号；External image: Trigger TTL signal

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